1、?2?PFM7 PFM7 10C4A?1?/min?m3103?2?SI?SI?1?2?M?M?7?S?A?N?3?ABCDEFGHNPN2?PNP2?NPN?1?1-5V?NPN?1?4-20mA?PNP?1?1-5V?PNP?1?4-20mA?NPN?1?3?PNP?1?3?L?C4, C6, C8, N7?01, 02, N01, N02, F01, F02?S?L?L?12SIN12SIN112SIN12SIN112SIN12SIN12SIN112SIN1?10?25?50?11?0102N01N02F01F02C4C6C8N7Rc1/8Rc1/4NPT1/8NPT1/4G1/8G1/
2、44?5/32?6?8?5/16?1/4?IN?OUT?P.35?0.2?10?5?/min0.5?25?12.5? /min1?50?25? /min2?100?50?/min10255011?CO2?1?P.2?2?P.2?P.2?P.35?R1CAT.CS100-63B 2008-5 最新信息请参考日文样本或英文样本?2DIN?ZS-33-JZS-33-MZS-33-MSZS33R?1?2?3?4?5?12345?V?R?S?T?DIN?F02?G1/4?DIN?ZS-33-JS?X693X694X731?Ar?CO2?P.35?37?B?A?A?B?1?2m?Z?ZS-33-D12SI
3、N?2mW?2m?ZS-33-FZS-33-D12SIN?2m2?PFM7?CAT.CS100-63B 2008-5 最新信息请参考日文样本或英文样本?1?10 /min?0.01 /min?9.99 /min?100 /min?0.1 /min?99.9 /min?2?PFM 710?0.01 /min?0.1 /min?PFM 711?0.1 /min?1 /min?CFM?PFM 710?0.1 /min?PFM 711?1 /min?3?ANR?ANR?20?1atm?65?R.H.?N /min?0?1atm?SI?/min? ?4?OFF?2?5?5?100?24?5?100?50
4、0?9.5?5?1.5s?90?100ms?6?PFM710PFM725PFM750PFM711?3?2?N2?ArCO2?1?1?N2?ArCO2?N2?ArCO2?N2?Ar?CO2?JIS B8392.1-1. 1.2?1.6.2?ISO8573.1-1. 1.2?1.6.2?0.2?10 /min0.2?5 /min0.2?10.5 /min0.2?5.2 /min0?10.5 /min0?5.2 /min0.01 /min0.1 /Pulse0.5?25 /min0.5?12.5 /min0.5?26.3 /min0.5?13.1 /min0?26.3 /min0?13.1 /min
5、0.1 /min0.1 /Pulse1?F.S.?3?F.S.?5?F.S.?0.35MPa?100kPa?750kPa?70kPa?750kPa1MPa?999999 ?4?NPN?PNP?80mADC28V?NPN?NPN?1V?80mA?PNP?1.5V?80mA?1s?50ms?0.5s?2s?NPN?PNP?1.5s?90?30ms?3?LED7?2?/?10?/1sOUT1?ON?OUT2?ON?DC24V10?55mA?IP400?50?0?50?10?60?35?85?R.H.?AC1000V?1?50M?DC500V?490m/s2?X, Y, Z? ?3?/min?CFM1
6、0-2?ft310-12?F.S.?15?35?5?F.S.?0?50?1?5V?1k?4?20mA?600?50?10?500Hz ?1.5mm?98m/s2?X, Y, Z? 2?10?150Hz ?1.5mm?19.6m/s2?X, Y, Z? 2?5?6?3?F.S.?5?F.S.?1?50 /min1?25 /min1?52.5 /min1?26.2 /min0?52.5 /min0?26.2 /min0.1 /min0.1 /Pulse2?100 /min2?50 /min2?105 /min2?52 /min0?105 /min0?52 /min0.1 /min1 /Pulse?
7、3PFM7 ?CAT.CS100-63B 2008-5 最新信息请参考日文样本或英文样本?CO2?3 ?V?12 ?mA?01? 125g? 135g?165g? 175g? 55g? 65g?95g?105g? 95g? ?105g?135g?145gLCP?PBT?HNBR?FKM?Au?SUS304Rc1/802Rc1/4N01NPT1/8N02NPT1/4F01G1/8G1/4C4F024?5/32?C66?C88?5/16?N71/4?102550100PFM710-?-C/EPFM725-?-C/EPFM750-?-C/EPFM711-?-C/E?1?5V? /min?10?5?2
8、5?12.5?50?25?100?50?PFM710-?-D/FPFM725-?-D/FPFM750-?-D/FPFM711-?-D/F?4?20mA?0420?mA?00015?VNPN2? PFM7?A?NPN? PFM7?C?/PFM7?D?NPN? PFM7?G?PNP2? PFM7?B?PNP? PFM7?E?/PFM7?F?PNP? PFM7?H?Max.80mA? DC? OUT1? OUT2?PFM7?B?50msec0V50msec?50msec0V50msec? OUT1? OUT2?PFM7?A? DC?Max.28V,80mAMax.28V, 80mA? 1V? DC?
9、 OUT1? OUT2? DC?DC24V? DC? OUT1? OUT2? DC?Max.80mA? 1.5V?DC24VMax.28V, 80mA? 1V? : ? ? 30msec ?DC24VMax.28V, 80mA? 1V?C : ?1?5V ?1k?D : ?4?20mA ?50?600?DC24VMax.80mA?1.5V?C : ?1?5V ?1k?D : ?4?20mA ?50?600?DC24VMax.80mA? 1.5V? : ? ? 30msec ?DC24VNPN2? PFM7?A?PNP2? PFM7?B?NPN? PFM7?G?NPN? PFM7?C?NPN?
10、PFM7?D?PNP? PFM7?E?PNP? PFM7?F?PNP? PFM7?H?CO2? /min? DC? OUT1? DC? DC? OUT1? DC? DC? OUT1? DC? DC? OUT1? DC?4?PFM7?CAT.CS100-63B 2008-5 最新信息请参考日文样本或英文样本?PFM7?-C4/C6/C8/N7?mm?4?5/32?68?5/16?1/4A64.264.668 64.6PFM7?-C4L/C6L/C8L/N7L?mm?4?5/32?68?5/16?1/4A10.110.312 10.31848A1INOUT1DC?OUT2DC?2?1IN2?OUT
11、1DC?OUT2DC?184888186810.23?34.2?143A23.4OUTIN1810.2143313?34.2?23.4INOUT28822.6 ?528822.6 ?55PFM7 ?CAT.CS100-63B 2008-5 最新信息请参考日文样本或英文样本?PFM7?-?N?01/?N?02/F01PFM7?-?N?01L/?N?02L/F01L4870?17181IN2?Rc1/8?1/4NPT1/8?1/4G1/8DC?DC?OUT2OUT123.4181431310.23?34.2?INOUT8848181IN?17DC?DC?OUT2OUT12?Rc1/8?1/4NPT
12、1/8?1/4G1/8683?34.2?184310.211323.4INOUT28822.6 ?5828822.6 ?56?PFM7?CAT.CS100-63B 2008-5 最新信息请参考日文样本或英文样本?PFM7?-F02PFM7?-F02L1IN18OUT1DC?OUT2DC?2?G1/41810.213?34.2?431323.4INOUT4878?211IN?21DC?OUT22?G1/4OUT1DC?8848181823.468174313?34.2?10.2INOUT22.6 ?582882822.6 ?57PFM7 ?CAT.CS100-63B 2008-5 最新信息请参考
13、日文样本或英文样本?PFM7?S-C4/C6/C8/N7?mm?4?5/32?68?5/16?1/4A92.292.696 92.6PFM7?S-C4L/C6L/C8L/N8L?mm?4?5/32?68?5/16?1/4A10.110.312 10.3184858881INDC?DC?OUT2OUT12?10.23?34.2?A431186851.5?Max.58.5?23.4INOUT1INDC?OUT1DC?OUT22?18485876A51.5?Max.58.5?13?34.2?310.24311823.4INOUT2820832.6 ?522.6 ?52888?PFM7?CAT.CS1
14、00-63B 2008-5 最新信息请参考日文样本或英文样本?PFM7?S-?N?01/?N?02/F01PFM7?S-?N?01L/?N?02L/F01L1IN?17DC?DC?OUT2OUT12?Rc1/8?1/4NPT1/8?1/4G1/84858881810.23?34.2?18681343151.5?Max.58.5?23.4INOUT1INDC?OUT1OUT2DC?2?Rc1/8?1/4NPT1/8?1/4G1/81848587698?171813?34.2?43110.251.5?Max.58.5?323.4INOUT2820832.6 ?522.6 ?52889PFM7 ?C
15、AT.CS100-63B 2008-5 最新信息请参考日文样本或英文样本?PFM7?S-F02PFM7?S-F02L1IN?212?OUT2DC?DC?OUT1G1/41888584851.5?Max.58.5?6823.41817433?34.2?110.2INOUT1IN2?G1/4OUT2DC?OUT1DC?211067658481823.451.5?Max.58.5?10.21843113?34.2?3INOUT2820832.6 ?528822.6 ?510?PFM7?CAT.CS100-63B 2008-5 最新信息请参考日文样本或英文样本?mm?4?5/32?68?5/16?1/
16、4A92.292.696 92.6?mm?4?5/32?68?5/16?1/4A64.264.668 64.6A582829.9OUT? 1?3.242.53IN782829.93?1?3.251.5?Max.58.5?76A42.539378182829.942.53?1?3.251.5?Max.58.5?29.928188858342.5? 1?3.2?R3? 1?3.2mm?R3? 1?3.2mm94?74?0.5?034?24?0.5?094?54?0.5?034?24?0.5?04R3?4R3?4R3?4R3?4R3?4R3?11PFM7 ?CAT.CS100-63B 2008-5
17、最新信息请参考日文样本或英文样本18n?34.4184811IN1ININ4352.434261824287643.436431.248181.251.5?Max.58.5?18434848362834261843.4?DIN? F02?G1/4?DIN?DIN?80?30V4AWG26?28?0.08mm?0.50mm?1.00mm?3.5?0.10?0.2552?6.5?21?2020?50?020?0?5303?ZS-33-D12?PFM7?CAT.CS100-63B 2008-5 最新信息请参考日文样本或英文样本?350?kPa?PFM710, 510/10?/min?kPa?0.35
18、0.300.250.200.150.100.0512468100PFM750, 550/50? /min?kPa?4321510203040500PFM711, 511/100?/min?PFM725, 525/25? /min?kPa?1.00.80.60.40.25101520250?kPa?141210864210204060801000PFM725, 525/25? /min?PFM711, 511/100?/min?PFM710, 510/10? /min?PFM750, 550/50?/min?6040200510150?l/min?750?kPa?300?kPa?100?kPa?
19、l/min?12010080604020510150750?kPa?300?kPa?100?kPa?l/min?302010510150750?kPa?300?kPa?100?kPa?l/min?15105051015750?kPa?300?kPa?100?kPa? /min? /min? /min? /min?25PFM7?PFM5?CAT.CS100-63B 2008-5 最新信息请参考日文样本或英文样本?2IN1S?OUT1?OUT2?LED?(Rh)?(Ru)?(Rd)?(Ra)?MEMS?(a)?Rh?Ru?Rd?(b)?Ru?Rd?Ru?Rd?Ra?RaRu Rh RdRaRu R
20、h RdFlow?b?a?O?O?O?B?O?O?1234567891011121314151617?FKMHNBRSUS304PBTLCP?FKMSUS304PBTHNBRPBT?HNBRHNBRPFM7PFM5?OUT1?ON?OUT1?OUT2?ON?OUT2?OUT1?LED?ON/OFF?ON/OFF?11 98437 69510111215141316172226?PFM7/PFM5?CAT.CS100-63B 2008-5 最新信息请参考日文样本或英文样本?2m?IN? ?OUT? ?No.?ZS-33-DZS-33-P1LZS-33-P2LZS-33-10NZS-33-25NZ
21、S-33-50NZS-33-11NZS-33-10NLZS-33-25NLZS-33-50NLZS-33-11NLZS-33-C4ZS-33-C6ZS-33-C8ZS-33-N7ZS-33-01ZS-33-N01ZS-33-F01ZS-33-02ZS-33-N02ZS-33-F0210 /min?25 /min?50 /min?100 /min?10 /min?25 /min?50 /min?100 /min?4?5/32?68?5/16?1/4Rc1/8NPT1/8G1/8Rc1/4NPT1/4G1/4?1234567827PFM7/PFM5 ?CAT.CS100-63B 2008-5 最新
22、信息请参考日文样本或英文样本?OUT1?Ar?CO2?CO2?1/2?N2?ON?OFF?ON?OFF?0.05?0.5?1?2?ON-OFF?ON?ON?(OFF?)?20?1?0?1?GND?30ms?0?0?PFM710?PFM711?100?PFM710? ?0.1 /minPFM711? ?1 /min1000?PFM710?0.01 /minPFM711? ?0.1 /min?5? ? ? ? ? OUT1? ?80mA? ? ? ? ? OUT2? ?80mA?OFF? ? ? ? ?1?1?30?OFF?OFF?OFF?2?5?100?0?7%F.S.?PFM?34CAT.CS
23、100-63B 2008-5 最新信息请参考日文样本或英文样本PFM7/PFM5 ?OrderMade?IN?OUT?PFM ?-C4/C6/C8/N7-?-X694PFM ?-?01/02-?-X693PFM ?-?01/02-?-X694PFM 7X693?IN?OUT?IN?OUT?X693X694?57?IN23.413A431?34.2?3OUTB18482010.2INOUT23.410.2143?34.2?133B482018AINOUT23.4CA204818B313?34.2?43110.2OUT23.4B481820IN133A43?34.2?110.2C?C4C6C8N7
24、4?5/32?68?5/16?1/4A10.110.312 10.3B 8.1 8.310 8.3?Rc1/8?1/4NPT1/8?1/4G1/8G1/4A1317B1115C?1721PFM ?-C4/C6/C8/N7-?-X69375757575?P.1?P.13?X693, X694?35CAT.CS100-63B 2008-5 最新信息请参考日文样本或英文样本?PFM ?S-C4/C6/C8/N7-?-X693PFM ?S-C4/C6/C8/N7-?-X694PFM ?S-?01/02-?-X693PFM ?S-?01/02-?-X694OUTIN23.451.5?Max58.5?13
25、B4820183?34.2?431A10.2OUTIN23.4A51.5?Max58.5?204818B313?34.2?43110.2?4?5/32?68?5/16?1/4A10.110.312 10.3B 8.1 8.310 8.3?4?5/32?68?5/16?1/4A10.110.312 10.3B36.136.337 36.3?Rc1/8?1/4NPT1/8?1/4G1/8G1/4A1317B1115C?1721?Rc1/8?1/4NPT1/8?1/4G1/8G1/4A1317B3943C?1721INOUT23.451.5?Max58.5?13B4820183?34.2?431A1
26、0.2COUTIN23.4A51.5?Max58.5?2048B18313?34.2?43110.2C75757575OrderMadePFM7/PFM5 ?36CAT.CS100-63B 2008-5 最新信息请参考日文样本或英文样本OrderMade?Ar?CO2?PFM 7X731?7?P.1?P.13?X731?Ar?CO2?92?8?90?10?80?20?70?30?60?40?PFM710?Ar92?90?80?70?60?92?90?80?70?60?92?90?80?70?60?92?90?80?70?60?8?10?20?30?40?8?10?20?30?40?8?10?2
27、0?30?40?8?10?20?30?40?0.2?7.0 /min0.5?25.0 /min0.5?20.0 /min1.0?50.0 /min1.0?40.0 /min2?100 /min2?90 /min2?80 /min0.2?7.4 /min0.5?26.3 /min0.5?21.0 /min1.0?52.5 /min1.0?42.0 /min2?105 /min2?95 /min2?84 /minPFM725PFM750PFM711CO2?Vmax?Imax0?7.4 /min0?26.3 /min0?21.0 /min0?52.5 /min0?42.0 /min0?105 /min0?95 /min0?84 /min3.80V5.00V4.20V5.00V4.20V5.00V4.60V4.20V15.2mA20.0mA16.8mA20.0mA16.8mA20.0mA18.4mA16.8mA?1?5V?V?5Vmax1000?4?20mA?mA?20Imax40?PFM7/PFM5 ?37CAT.CS100-63B 2008-5 最新信息请参考日文样本或英文样本
